Mei Rui

Title: Mei Rui - Innovator in Plasma Reactor Technology

Introduction

Mei Rui is a prominent inventor based in Shanghai, China. She has made significant contributions to the field of plasma technology, particularly with her innovative designs that enhance temperature control in plasma reactors. Her work is vital for advancements in various applications, including semiconductor manufacturing.

Latest Patents

Mei Rui holds a patent for a Multi-zone temperature control plasma reactor. This invention includes a reaction chamber and a base designed to support a substrate. The reactor features an RF power supply that outputs RF power into the reaction chamber. The base incorporates an electrostatic chuck with a set of heaters, each consisting of a heater and an electronic switch connected in series. The heating controller is designed to receive temperature control signals and output drive signals to the electronic switches, ensuring precise temperature management.

Career Highlights

Mei Rui is currently employed at Advanced Micro-fabrication Equipment Inc. China, where she continues to develop cutting-edge technologies in the field of micro-fabrication. Her expertise and innovative mindset have positioned her as a key player in her organization.

Collaborations

Some of her notable coworkers include Tuqiang Ni and Steven Lee, who collaborate with her on various projects within the company.

Conclusion

Mei Rui's contributions to plasma reactor technology exemplify her dedication to innovation and excellence in her field. Her patent for the Multi-zone temperature control plasma reactor showcases her ability to address complex challenges in technology.