Location History:
- Kyungki-do, KR (2002)
- Seongnam, KR (2002)
Company Filing History:
Years Active: 2002
Title: The Innovative Contributions of Mee-young Yoon
Introduction
Mee-young Yoon is a prominent inventor based in Kyungki-do, South Korea. She has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. Her work focuses on methods that enhance the efficiency and effectiveness of semiconductor devices.
Latest Patents
Among her latest patents is a method for forming metal interconnections in semiconductor devices. This innovative approach involves creating a metal interconnection by filing a contact hole or a groove with a high aspect ratio. The process includes forming an interdielectric layer pattern with a recessed region on a semiconductor substrate, followed by the application of a barrier metal layer. An anti-nucleation layer is selectively formed on the non-recessed region, allowing for the selective formation of a metal plug in the recessed area. This method ensures complete filling of the contact hole or groove, which is crucial for high-performance semiconductor devices.
Another notable patent is related to the formation of selective metal layers and capacitors. This method allows for the selective deposition of a sacrificial metal layer on a conductive layer, which can then be replaced with a deposition metal layer such as titanium or platinum. This process can be performed at temperatures of 500°C or lower, making it suitable for various semiconductor applications.
Career Highlights
Mee-young Yoon is currently employed at Samsung Electronics Co., Ltd., where she continues to push the boundaries of semiconductor technology. Her work has been instrumental in advancing the capabilities of electronic devices, contributing to the overall progress of the industry.
Collaborations
Throughout her career, Mee-young has collaborated with notable colleagues, including Sang-in Lee and Hyun-seok Lim. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Mee-young Yoon's contributions to semiconductor technology through her innovative patents and collaborative efforts highlight her significant role in the field. Her work continues to influence the development of advanced electronic devices, showcasing the importance of innovation in technology.