Phoenix, AZ, United States of America

Matthew L Bunch


Average Co-Inventor Count = 3.0

ph-index = 2

Forward Citations = 81(Granted Patents)


Company Filing History:


Years Active: 1986-1987

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2 patents (USPTO):Explore Patents

Title: Innovator Spotlight: Matthew L. Bunch - Pioneer in CVD Technology

Introduction:

Matthew L. Bunch, based in Phoenix, AZ, is a distinguished innovator in the field of Chemical Vapor Deposition (CVD) technology. With an impressive portfolio of 2 patents, Bunch has made significant contributions to the semiconductor industry with his groundbreaking inventions.

Latest Patents:

1. CVD Heat Source: Bunch's invention revolutionizes the CVD process on semiconductor wafers by utilizing a plasma reactor with radiant heating lamps. The calibrated temperature sensing mechanism ensures precise control of the wafer heating, while the strategic gas supply system and antechamber design enhance deposition uniformity. This patent is particularly notable for tungsten disilicide deposition.

2. CVD Plasma Reactor: Another pioneering patent by Bunch, this innovation focuses on CVD on semiconductor wafers using a plasma reactor with radiant heating lamps. Similar to the previous patent, it emphasizes temperature control, gas supply mechanisms, and deposition uniformity. The partial ignition of the plasma optimizes the tungsten disilicide deposition process.

Career Highlights:

Currently associated with Spectrum CVD, Inc., Matthew L. Bunch continues to drive innovation in the CVD technology domain. His expertise and dedication have earned him a reputation as a leader in the field, consistently pushing the boundaries of semiconductor manufacturing.

Collaborations:

Bunch has collaborated closely with esteemed colleagues such as J.B. Price and Robert W. Stitz, fostering a culture of innovation and knowledge-sharing within the industry. Together, they have worked on various projects aimed at advancing CVD technology and its applications.

Conclusion:

In conclusion, Matthew L. Bunch stands out as a visionary inventor who has significantly influenced the semiconductor industry through his cutting-edge CVD technologies. His patents and collaborations underscore his commitment to driving progress and shaping the future of semiconductor manufacturing.

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