Matt Busche

Title: Matt Busche: Innovator in Plasma Processing Technology

Introduction

Matt Busche is a notable inventor based in Santa Clara, CA (US). He has made significant contributions to the field of plasma processing technology. His innovative approach has led to the development of a unique patent that enhances the efficiency of plasma processing chambers.

Latest Patents

Matt Busche holds a patent for a temperature-controlled window of a plasma processing chamber component. This invention features a dielectric window that forms the top wall of the plasma processing chamber, incorporating at least first and second channels. The design includes a liquid circulating system with a source of cold liquid in a first closed loop, which is not in fluid communication with the channels, and a source of hot liquid in a second closed loop that is in fluid communication with the channels. The system utilizes first and second heat exchangers to control the temperature of the hot liquid, ensuring optimal performance during plasma processing.

Career Highlights

Matt Busche is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on advancing technologies that improve the efficiency and effectiveness of plasma processing. With a strong background in engineering and innovation, he has established himself as a key player in his field.

Collaborations

Throughout his career, Matt has collaborated with talented individuals such as Adam Christopher Mace and Michael S. Kang. These partnerships have fostered a creative environment that encourages the development of groundbreaking technologies.

Conclusion

Matt Busche's contributions to plasma processing technology exemplify the spirit of innovation. His patent for a temperature-controlled window demonstrates his commitment to enhancing industrial processes. As he continues to work at Lam Research Corporation, his impact on the field is sure to grow.