Location History:
- Robecchetto, IT (2002)
- Robecchetto con Induno, IT (2004)
Company Filing History:
Years Active: 2002-2004
Title: Massimo Garavaglia: Innovator in MEMS Technology
Introduction
Massimo Garavaglia is a notable inventor based in Robecchetto Con Induno, Italy. He has made significant contributions to the field of Micro-Electro-Mechanical Systems (MEMS) technology. With a total of 2 patents, his work focuses on innovative methods for manipulating MEMS devices.
Latest Patents
Garavaglia's latest patents include a method for manipulating MEMS devices integrated on a semiconductor wafer. This method involves bonding the semiconductor wafer, which includes the MEMS devices, onto a support with a bonding sheet. The process may also encompass completely cutting or dicing the semiconductor wafer into multiple independent MEMS devices. Additionally, he has developed a semiconductor integrated inertial sensor featuring a calibration microactuator. This sensor consists of an inner stator and an outer rotor, which are electrostatically coupled by mobile and fixed sensor arms.
Career Highlights
Massimo Garavaglia is currently employed at STMicroelectronics S.r.l., where he continues to advance his research and development in MEMS technology. His innovative approaches have positioned him as a key figure in the industry.
Collaborations
Throughout his career, Garavaglia has collaborated with notable colleagues, including Sarah Zerbini and Benedetto Vigna. These partnerships have further enhanced his contributions to the field.
Conclusion
Massimo Garavaglia's work in MEMS technology exemplifies innovation and dedication. His patents and career achievements reflect his commitment to advancing this critical area of technology.