Masanori Ito

Title: **Masanori Ito: Innovator in Substrate Technology**

Introduction

Masanori Ito is an accomplished inventor based in Kanagawa, Japan, recognized for his contributions in the field of substrate technology. With a total of two patents, his inventions focus on enhancing methods and apparatuses related to substrate handling in semiconductor manufacturing.

Latest Patents

Masanori Ito's latest patents include the "Substrate Lifting Apparatus" and the "Power Supply Apparatus for Electrostatic Chuck and Substrate Control Method." The substrate lifting apparatus is designed to facilitate the one-step transfer of a to-be-processed substrate using lifting pins that move between hidden and protruded positions. This innovative apparatus includes a driving means that allows for the upward movement of the lifting pins to be stopped at an intermediate position, optimizing substrate handling.

His other patent, regarding the power supply apparatus for the electrostatic chuck, incorporates DC power source units to apply voltage to the electrodes while also having AC current control through electrostatic capacitance. This design allows for effective switching between circuits that manage the attraction and holding of substrates, showcasing the cutting-edge technology implemented in his inventions.

Career Highlights

Masanori Ito currently works at Ulvac Techno, Ltd., a company known for its advancements in vacuum technology and semiconductor manufacturing equipment. His role as an inventor plays a critical part in developing solutions that improve substrate handling efficiency, thereby contributing significantly to the sector.

Collaborations

Throughout his career, Masanori has collaborated with notable colleagues like Katsunori Fujii and Yasushi Iwata. Together, they have worked on various projects that marry their expertise in substrate technology with innovative engineering solutions, resulting in impactful patents.

Conclusion

Masanori Ito’s work within Ulvac Techno, Ltd. and his innovative patents underscore his importance in the field of substrate handling. By advancing technologies that improve manufacturing processes, he exemplifies the vital role of inventors in driving innovation forward within the semiconductor industry. His contributions not only enhance operational efficiency but also pave the way for future developments in technology.