Company Filing History:
Years Active: 1993
Title: Masaki Uematsu: Innovator in Plasma Ashing Technology
Introduction
Masaki Uematsu is a notable inventor based in Chigasaki, Japan. He has made significant contributions to the field of plasma technology, particularly with his innovative designs and applications. His work has led to advancements that are crucial in various industrial processes.
Latest Patents
Uematsu holds a patent for a plasma ashing apparatus. This apparatus features a vacuum treatment chamber designed to receive a substrate coated with a resist film. It includes a reactive gas introduction pipe equipped with a plasma applicator, a vacuum exhaust pipe, and a heating means for heating the substrate. The design incorporates two electrodes arranged in parallel, with one serving as a substrate electrode and the other as a circular counter electrode. These electrodes are connected to an RF power source, forming a cathode electrode. The counter electrode is uniquely designed with multiple concentric perforations, enhancing its functionality.
Career Highlights
Uematsu's career is marked by his dedication to advancing plasma technology. His innovative approach has led to the development of efficient and effective solutions in the field. His patent reflects his commitment to improving industrial processes through technological advancements.
Collaborations
Uematsu has worked alongside notable colleagues, including Masashi Kikuchi and Richard L. Bersin. Their collaborative efforts have contributed to the success of various projects and innovations in the field.
Conclusion
Masaki Uematsu is a distinguished inventor whose work in plasma ashing technology has made a significant impact. His innovative designs and collaborative spirit continue to inspire advancements in the industry.