Company Filing History:
Years Active: 2004-2020
Title: Makoto Nakaya: Innovator in Ion Beam Technology
Introduction
Makoto Nakaya is a distinguished inventor based in Kyoto, Japan. He has made significant contributions to the field of ion beam technology, holding a total of 3 patents. His innovative work has advanced the capabilities of ion beam irradiation apparatuses, which are essential in various applications, including semiconductor manufacturing.
Latest Patents
One of Nakaya's notable patents is an ion beam irradiation apparatus designed to enhance wafer processing. This apparatus features a wafer processing chamber that houses a wafer supporting mechanism, which is used to irradiate the wafer with an ion beam. Additionally, it includes a transport mechanism housing chamber that facilitates the movement of the wafer supporting mechanism in a horizontal direction. The design incorporates an aperture for seamless movement, ensuring efficient processing.
Another significant patent involves a sophisticated ion beam irradiation apparatus that utilizes three orthogonal axes for precise control. This system includes an irradiation angle setting motor that adjusts the angle of the ion beam by rotating a holder around a center axis. The apparatus is equipped with linear motors that allow for vertical and horizontal movement, enabling the substrate holding surface to scan linearly along a designated axis. This innovation enhances the accuracy and efficiency of ion beam applications.
Career Highlights
Throughout his career, Nakaya has worked with reputable companies, including Nissin Ion Equipment Co., Ltd. and Nissin Electric Co., Ltd. His experience in these organizations has contributed to his expertise in ion beam technology and its applications in various industries.
Collaborations
Nakaya has collaborated with notable colleagues, including Satoru Yuasa and Yoshio Tamura. Their combined efforts have furthered advancements in the field of ion beam technology, leading to innovative solutions and improved methodologies.
Conclusion
Makoto Nakaya's contributions to ion beam technology through his patents and collaborations have significantly impacted the industry. His work continues to inspire advancements in semiconductor manufacturing and related fields.