Company Filing History:
Years Active: 2021
Title: Lakshmikantha K Shirahatti: Innovator in Electronic Device Manufacturing
Introduction
Lakshmikantha K Shirahatti is a notable inventor based in Gadag, India. He has made significant contributions to the field of electronic device manufacturing. His innovative work has led to the development of a unique patent that enhances the efficiency of substrate carrier handling.
Latest Patents
One of Lakshmikantha's key patents is titled "Selectable-rate bottom purge apparatus and methods." This invention pertains to electronic device manufacturing systems that include an equipment front end module (EFEM). The EFEM is designed with a load port assembly that receives a substrate carrier, specifically a front opening unified pod (FOUP). The load port assembly features a receiving plate equipped with multiple gas nozzles. These nozzles connect to purge ports at the bottom of the substrate carrier and to a purge apparatus within the load port assembly. The innovative purge apparatus is capable of delivering gas to the substrate carrier at a selectable flow rate. Additionally, it can provide gas to different sections of the substrate carrier, each at a distinct flow rate. This invention streamlines the process of purging substrate carriers, thereby improving manufacturing efficiency.
Career Highlights
Lakshmikantha K Shirahatti is currently employed at Applied Materials, Inc., a leading company in the field of semiconductor manufacturing equipment. His work at Applied Materials has allowed him to apply his innovative ideas in a practical setting, contributing to advancements in technology.
Collaborations
Throughout his career, Lakshmikantha has collaborated with esteemed colleagues, including Dean C Hruzek and Paul Benjamin Reuter. These collaborations have fostered a creative environment that encourages the exchange of ideas and innovation.
Conclusion
Lakshmikantha K Shirahatti is a distinguished inventor whose work in electronic device manufacturing has made a significant impact. His patent for a selectable-rate bottom purge apparatus exemplifies his commitment to innovation and efficiency in the industry.