This inventor holds 5 USPTO granted patents and 13 published patent applications. Top assignee: Semes Co., Ltd.. Active years: 2024-2025.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2024-2025
Title: Kyeong Min Lee: Innovator in Substrate Processing Technology
Introduction
Kyeong Min Lee is a notable inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of substrate processing, holding a total of 5 patents. His work focuses on enhancing the efficiency and effectiveness of substrate processing methods and apparatuses.
Latest Patents
Kyeong Min Lee's latest patents include innovative substrate processing apparatuses and methods. One of his patents discloses a substrate processing apparatus that allows a chemical liquid to penetrate deeply into the gaps between patterns of a substrate. This apparatus features a chamber with a defined processing space, a chuck to support the substrate, and a chemical liquid supply that delivers droplets of chemical liquid onto the substrate's surface. Additionally, a pressurizer is included to ensure that the chemical liquid fills the gaps between the substrate patterns effectively. Another patent describes a similar substrate processing apparatus that incorporates a rotatable substrate support and a controller to apply varying rotation speeds, generating inertial behavior in the chemical liquid coated on the substrate.
Career Highlights
Kyeong Min Lee is currently employed at Semes Co., Ltd., where he continues to develop innovative solutions in substrate processing technology. His work has been instrumental in advancing the capabilities of substrate processing, making significant impacts in various applications.
Collaborations
Kyeong Min Lee collaborates with talented coworkers, including Kang Sul Kim and Tae-Keun Kim, who contribute to the innovative projects at Semes Co., Ltd. Their teamwork fosters a creative environment that drives technological advancements.
Conclusion
Kyeong Min Lee is a prominent inventor whose work in substrate processing technology has led to multiple patents and significant advancements in the field. His contributions continue to shape the future of substrate processing methods and apparatuses.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile