Koujiro Suzuki

Title: Koujiro Suzuki: Innovator in Plate Pattern Inspection Technology

Introduction

Koujiro Suzuki is a notable inventor based in Kawasaki, Japan. He has made significant contributions to the field of pattern inspection technology, particularly through his innovative patent. His work is instrumental in enhancing the efficiency of pattern inspection processes in the semiconductor industry.

Latest Patents

Koujiro Suzuki holds a patent for a "Plate pattern forming method and its inspecting method." This method involves inspecting plate patterns formed by exposure and development using exposure data patterns that contain multiple patterns. The process includes a fine pattern removal step, which utilizes logical sum processing to consolidate overlaid patterns into a single pattern. Additionally, it incorporates minus-sizing and plus-sizing processing to refine and thicken the sides of the patterns, respectively. This results in the formation of a reference data pattern. By removing fine patterns that may cause pseudo defects, the method allows for a more accurate inspection process, limiting discrepancies to intrinsic defective patterns and significantly reducing the number of inspection steps required.

Career Highlights

Koujiro Suzuki is currently employed at Fujitsu Corporation, where he continues to develop and refine technologies related to pattern inspection. His expertise and innovative approach have positioned him as a key figure in his field.

Collaborations

Koujiro has collaborated with Satoshi Akutagawa, contributing to advancements in their shared area of expertise. Their partnership has fostered innovation and development within the company.

Conclusion

Koujiro Suzuki's contributions to the field of pattern inspection technology exemplify the impact of innovative thinking in the semiconductor industry. His patent not only enhances inspection accuracy but also streamlines the overall process, showcasing the importance of continuous innovation in technology.