Company Filing History:
1 out of 832,718 Years Active: 2004
Title: Kiyoshi Nashimoto: Innovator in Electrostatic Technology
Introduction
Kiyoshi Nashimoto is a notable inventor based in Hachiouzi, Japan. He has made significant contributions to the field of electrostatic technology, particularly through his innovative patent.
Latest Patents
Nashimoto holds a patent for an electrostatic chuck and substrate processing apparatus. This invention features an insulation layer that includes a mount plane for wafer placement, an inner electrode, and projecting portions that ensure contact with the wafer. The design allows for a backside gas to flow into a defined space, maintaining temperature uniformity of the wafer. The total areas of the contact planes of the projecting portions are specified to be between 5% and 10% of the inner electrode area, with heights ranging from 5 µm to 10 µm.
Career Highlights
Throughout his career, Kiyoshi Nashimoto has demonstrated a commitment to advancing technology in substrate processing. His work has been instrumental in improving the efficiency and effectiveness of electrostatic chucks used in various applications.
Collaborations
Nashimoto has collaborated with notable colleagues, including Hideyoshi Tsuruta and Satoru Yamada. Their combined expertise has contributed to the development of innovative solutions in their field.
Conclusion
Kiyoshi Nashimoto's contributions to electrostatic technology through his patent highlight his role as an influential inventor. His work continues to impact the industry positively, showcasing the importance of innovation in technology.