Company Filing History:
Years Active: 2008
Title: Kiyoharu Miyakawa: Innovator in Wafer Surface Inspection Technology
Introduction
Kiyoharu Miyakawa is a notable inventor based in Kiyotake, Japan. He has made significant contributions to the field of semiconductor technology, particularly in the inspection of wafer surfaces. His innovative approach has led to advancements in the efficiency and precision of wafer inspection processes.
Latest Patents
Miyakawa holds a patent for an "Apparatus for inspecting wafer surface, method for inspecting wafer surface, apparatus for judging defective wafer, method for judging defective wafer, and apparatus for processing information on wafer surface." This invention allows for the inspection of scratches and staining on a wafer surface based on an LPD map obtained from a particle counter. The system detects aggregation of clustered point defects from two-dimensional distribution information, enhancing inspection efficiency and judgment precision regarding defective status.
Career Highlights
Kiyoharu Miyakawa is associated with Sumco Techxiv Kabushiki Kaisha, where he has been instrumental in developing technologies that improve wafer inspection processes. His work has facilitated better communication between wafer suppliers and consumers, allowing for shared information that aids in process improvements.
Collaborations
Miyakawa has collaborated with notable colleagues such as Kouzou Matsusita and Yukinori Matsumura. Their combined expertise has contributed to the advancements in wafer surface inspection technologies.
Conclusion
Kiyoharu Miyakawa's innovative contributions to wafer surface inspection technology have significantly impacted the semiconductor industry. His patent and collaborative efforts continue to enhance the efficiency and accuracy of wafer inspections, benefiting both suppliers and consumers alike.