Kent R Becker

Title: Kent R Becker: Innovator in Semiconductor Polishing Technology

Introduction

Kent R Becker is a notable inventor based in Fairfax, Vermont, who has made significant contributions to the field of semiconductor manufacturing. With a total of two patents to his name, Becker's work focuses on enhancing the efficiency and effectiveness of chemical mechanical polishing processes.

Latest Patents

Becker's latest patents include the "In-situ automated CMP wedge conditioner" and "Wafer edge cleaning." The first patent describes an apparatus and method for conditioning a CMP polishing pad to ensure consistent polishing throughout the process. This innovative apparatus features a translatable wedge-shaped conditioning plate with a three-point adjustable contact for proper alignment with the polishing pad. It also includes a high-pressure conditioning spray nozzle to clean the polishing pad and conditioning assembly during polishing, as well as a slurry dispensing nozzle to enhance wafer planarization. The operator can vary the frequency of oscillation to prevent groove formation in the polishing pad.

The second patent, "Wafer edge cleaning," addresses the challenges faced during the chemical mechanical polishing process for semiconductor wafers. This invention utilizes a pair of opposed grippers to move the wafer between stations while rotating it. Brushes along the periphery of the wafer come into contact with its edge to remove foreign material and residue buildup. Additionally, cleaning fluid can be introduced to flush away or break up the residue.

Career Highlights

Kent R Becker is currently employed at International Business Machines Corporation (IBM), where he continues to innovate in the semiconductor field. His work has contributed to advancements in manufacturing processes that are critical for the production of high-quality semiconductor devices.

Collaborations

Becker has collaborated with notable colleagues, including Scott R Cline and Paul A Manfredi, who have also contributed to the field of semiconductor technology.

Conclusion

Kent R Becker's contributions to semiconductor polishing technology through his innovative patents demonstrate his commitment to improving manufacturing processes. His work at IBM and collaborations with fellow inventors highlight the importance of teamwork in driving technological advancements.