Company Filing History:
1 out of 15,471 
1 out of 902 Years Active: 1995-2003
Title: Innovations of Kenneth M Skulina
Introduction
Kenneth M Skulina is a notable inventor based in Livermore, CA (US). He has made significant contributions to the field of x-ray optics and multilayer structures, holding a total of 2 patents. His work has implications in various advanced imaging technologies.
Latest Patents
One of his latest patents is a method for fabricating beryllium-based multilayer structures. This invention focuses on creating beryllium-based multilayer mirrors that are useful in the wavelength region greater than the beryllium K-edge (111 Å or 11.1 nm). The process involves alternating sputter deposition of beryllium and a metal, typically from the fifth row of the periodic table, such as niobium (Nb), molybdenum (Mo), ruthenium (Ru), and rhodium (Rh). It also includes industrial hygiene controls for the safe handling of beryllium. The mirrors produced through this process are designed for use in soft x-ray and extreme-ultraviolet projection lithography, requiring mirrors with high reflectivity (>60%) for x-rays in the range of 60-140 Å (60-14.0 nm).
Another significant patent is the fabrication process for a gradient index x-ray lens. This process enables the creation of high-efficiency x-ray lenses that operate in the 0.5-4.0 keV region. These lenses are suitable for applications in biological imaging, surface science, and x-ray lithography of integrated circuits. The fabrication process broadly involves co-sputtering multi-layers of film on a wire, followed by slicing and mounting on a block, and then ion beam thinning to a thickness determined by periodic testing for efficiency. This innovation allows for the development of optical elements for the next generation of imaging and x-ray lithography instruments in the soft x-ray region.
Career Highlights
Kenneth has worked with prestigious institutions, including the University of California and the United States of America as represented by the Department of Energy. His work has been instrumental in advancing the field of x-ray optics and multilayer structures.
Collaborations
Some of his notable coworkers include Richard M Bionta and Daniel M Makowiecki. Their collaborative efforts have contributed to the success of various projects in the field.
Conclusion
Kenn