Keisuke Okugawa is a prominent inventor based in Aichi, Japan. He has made significant contributions to the field of electrostatic chuck technology, holding a total of 10 patents. His work has been instrumental in advancing the efficiency and functionality of various electronic components.

Latest Patents

One of Okugawa's latest patents involves an innovative electrostatic chuck design. This electrostatic chuck includes a body substrate made of ceramic, featuring a substrate front surface and a substrate rear surface. It incorporates an attraction electrode within the body substrate and a metal base that faces the substrate rear surface. The design also includes an internal through hole that penetrates the metal base, allowing for enhanced functionality. The body substrate is equipped with multiple heating regions, each containing a heater electrode. Additionally, the internal through hole houses several heater electrode terminals that connect electrically to the heater electrodes in each heating region.

Career Highlights

Keisuke Okugawa is currently employed at NGK Spark Plug Company, Limited, where he continues to innovate and develop new technologies. His expertise in electrostatic chuck design has positioned him as a key player in the industry.

Collaborations

Throughout his career, Okugawa has collaborated with notable colleagues, including Yosuke Shinozaki and Toshihisa Nomura. These collaborations have further enriched his work and contributed to the advancement of technology in his field.

Conclusion

Keisuke Okugawa's contributions to electrostatic chuck technology exemplify his dedication to innovation. His patents and collaborations reflect a commitment to advancing the industry and improving electronic components.

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