Location History:
- Tokyo, JP (2001)
- Toyama, JP (2022)
Company Filing History:
Years Active: 2001-2022
Title: Kazunori Tsutsuguchi: Innovator in Substrate Processing Technology
Introduction
Kazunori Tsutsuguchi is a notable inventor based in Toyama, Japan. He has made significant contributions to the field of substrate processing technology, holding 2 patents that showcase his innovative approach to engineering solutions.
Latest Patents
His latest patents include a substrate processing apparatus and a method of plasma processing a substrate placed on a substrate table. The substrate processing apparatus features a configuration that includes an intake damper and an intake fan, which communicate with an intake port that sucks air into a transfer chamber connected to a process chamber. It also includes a valve for an inert gas introduction pipe, an exhaust fan, and a controller that manages the atmospheric conditions within the transfer chamber. The plasma processing method involves applying RF power to gases within a processing chamber to perform plasma processing while maintaining a predetermined pressure.
Career Highlights
Kazunori Tsutsuguchi has worked with Kokusai Electric Co., Ltd. and Kokusai Electric Corporation, where he has honed his skills and contributed to various projects in substrate processing technology. His work has been instrumental in advancing the capabilities of plasma processing methods.
Collaborations
Some of his notable coworkers include Masato Terasaki and Satoru Takahata, who have collaborated with him on various projects.
Conclusion
Kazunori Tsutsuguchi's contributions to substrate processing technology through his patents and career achievements highlight his role as an innovator in the field. His work continues to influence advancements in processing technologies.