Kazuhisa Manabe

Title: Kazuhisa Manabe: Innovator in Ion Implantation Technology

Introduction

Kazuhisa Manabe is a notable inventor based in Ehime, Japan. He has made significant contributions to the field of ion implantation technology, which is crucial for various applications in semiconductor manufacturing.

Latest Patents

Kazuhisa Manabe holds a patent for an "Ion implantation apparatus and ion implantation method." This innovative apparatus includes an implantation processing chamber, a high voltage unit, and a high-voltage power supply system. In the implantation processing chamber, ions are implanted into a workpiece. The high voltage unit features an ion source unit for generating ions and a beam transport unit that connects the ion source unit to the implantation processing chamber. The high-voltage power supply system applies a potential to the high voltage unit under various energy settings. It includes multiple current paths designed to return the beam current flowing into the workpiece back to the ion source unit, with each energy setting linked to a specific current path.

Career Highlights

Kazuhisa Manabe is associated with Sumitomo Heavy Industries Technology Co., Ltd., where he has been instrumental in advancing ion implantation technologies. His work has contributed to the efficiency and effectiveness of ion implantation processes in the semiconductor industry.

Collaborations

Kazuhisa Manabe collaborates with Takanori Yagita, enhancing the development of innovative technologies in their field.

Conclusion

Kazuhisa Manabe's contributions to ion implantation technology exemplify the importance of innovation in the semiconductor industry. His patent and work at Sumitomo Heavy Industries Technology Co., Ltd. highlight his role as a key inventor in this specialized field.