Location History:
- Chiba, JP (1998)
- Inbagun, JP (1999)
Company Filing History:
Years Active: 1998-1999
Title: Kazuhiro Nishina: Innovator in Substrate Processing Technology
Introduction
Kazuhiro Nishina is a notable inventor based in Chiba, Japan. He has made significant contributions to the field of substrate processing technology, particularly in the area of cleaning methods for processing chambers. With a total of 2 patents, his work has advanced the efficiency and effectiveness of substrate processing operations.
Latest Patents
One of Kazuhiro Nishina's latest patents is focused on a process for chlorine trifluoride chamber cleaning. This innovative method and apparatus are designed to remove particles and residue that accumulate inside a substrate processing system during operations. The process involves flowing an etchant gas comprising chlorine trifluoride (ClF₃), diluted with an inert carrier gas, into the processing chamber after the completion of the substrate processing operation. The system's parts with the most build-up are preferentially heated to enhance cleaning, while less affected areas are kept cooler to prevent overetching. This method allows for a more efficient cleaning process, reducing both particulate-related defects and deposition build-up.
Career Highlights
Kazuhiro Nishina is currently employed at Applied Materials, Inc., where he continues to develop innovative solutions for substrate processing challenges. His expertise in this field has positioned him as a key contributor to advancements in technology that enhance manufacturing processes.
Collaborations
Throughout his career, Kazuhiro has collaborated with notable colleagues, including Ming Xi and Steve (Aihua) Chen. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Kazuhiro Nishina's contributions to substrate processing technology through his patents and work at Applied Materials, Inc. highlight his role as a significant inventor in the field. His innovative methods for cleaning processing chambers demonstrate the impact of his work on improving manufacturing efficiency.