Company Filing History:
Years Active: 1979-1990
Title: Joseph J Loferski: Innovator in Sputtering Technology
Introduction
Joseph J Loferski is a notable inventor based in Providence, RI (US), recognized for his contributions to sputtering technology. He holds a total of four patents, showcasing his innovative approach to semiconductor deposition processes. His work has significantly impacted the field of materials science and engineering.
Latest Patents
Loferski's latest patents include a "Modular Sputtering Apparatus" and a "Method and Apparatus for Sputter Deposition of a Semiconductor." The modular sputtering apparatus is designed to facilitate changes in sputtering processes and target materials. It consists of multiple sputtering modules and a pumping stack module arranged in series, allowing for flexibility in configuration. The apparatus avoids the use of gate valves by incorporating connecting sleeves that enhance the efficiency of the sputtering process. His method for sputter deposition of a semiconductor involves a vacuum chamber where a semiconductor compound target is utilized. This method allows for the creation of various semiconductor material layers by adjusting the incident energy of sputtered species through the introduction of inert gas at different partial pressures.
Career Highlights
Throughout his career, Loferski has worked with reputable organizations such as Solamat Incorporated and Brown University. His experience in these institutions has contributed to his expertise in the field of semiconductor technology and materials engineering.
Collaborations
Loferski has collaborated with notable individuals in his field, including Barton Roessler and Christopher Case. These collaborations have likely enriched his research and development efforts, leading to innovative solutions in sputtering technology.
Conclusion
Joseph J Loferski's contributions to sputtering technology and semiconductor deposition processes highlight his role as a significant inventor in the field. His patents reflect a commitment to innovation and advancement in materials science.