John R Burgess

Title: Inventor Spotlight: John R. Burgess

Introduction

John R. Burgess is an innovative inventor based in Dunstable, Massachusetts. With a strong background in engineering and technology, he has secured three patents that showcase his expertise and contribution to the field.

Latest Patents

Among his notable inventions, the patent titled "Mounting member method and apparatus with variable length supports" stands out. This innovative design features a deformable substrate chuck that includes a mounting plate supported by a plurality of individually controllable variable-length actuators. Each actuator can adjust the height of the mounting plate's supported portion, enabling precise control over the substrate's shape, such as that of a semiconductor wafer or flat panel display. Additionally, Burgess's invention incorporates an optical sensing system that generates control signals to optimize the substrate shape during operation.

Another significant patent is for "Low defect etching of patterns using plasma-stencil mask." This method involves a one-step process using anisotropic reactive ion etching through an apertured stencil positioned close to the resist-coated surface of a semiconductor wafer. This innovation enhances the plasma etch rate where the coating is exposed, allowing for effective etching in a limited exposure time while maintaining alignment processes within integrated circuits.

Career Highlights

Throughout his career, John R. Burgess has worked with notable companies, including Control Data Corporation and Hughes Danbury Optical Systems, Inc. His experiences in these organizations have informed his inventive process, leading to significant advancements in semiconductor technology and fabrication methods.

Collaborations

Burgess has had the opportunity to collaborate with talented colleagues, including Sterling P. Newberry and Donald O. Smith. These partnerships fostered a creative environment that encouraged the exchange of ideas and techniques, enhancing the impact of their collective work.

Conclusion

In summary, John R. Burgess's contributions as an inventor in the field of semiconductor technology are noteworthy. His innovative patents reflect a deep understanding of engineering principles and their applications in real-world scenarios. With a solid foundation in research and collaboration, Burgess continues to inspire current and future inventors.