Company Filing History:
Years Active: 2015-2018
Title: Innovations by Jing Zhou: A Look at His Contributions to CVD Technology
Introduction
Jing Zhou is an accomplished inventor based in Bridgewater, NJ (US). He has made significant contributions to the field of chemical vapor deposition (CVD) technology, holding a total of 3 patents. His work focuses on improving the efficiency and accuracy of temperature measurements in CVD processes.
Latest Patents
One of Jing Zhou's latest patents is titled "Control of stray radiation in a CVD chamber." This invention presents an apparatus and method for controlling stray radiation within a CVD chamber. The design includes a heater array disposed beneath a wafer carrier, which radiatively heats the wafer carrier. The patent outlines mechanisms to reduce scattered radiation originating from designated segments of the peripheral heating elements. This innovation enhances the reliability of temperature readings in optical wavelengths by minimizing stray radiation.
Another notable patent is the "Radiation thermometer using off-focus telecentric optics." This invention utilizes an off-focus telecentric lens arrangement in CVD reactors. The configuration allows for capturing radiation from proximate targets while diminishing the contribution of stray radiation. This is particularly beneficial for targets with highly specular surfaces, ensuring more accurate temperature measurements.
Career Highlights
Jing Zhou is currently employed at Veeco Instruments Inc., a company known for its advanced manufacturing equipment for the semiconductor industry. His work at Veeco has positioned him as a key player in the development of innovative technologies that enhance CVD processes.
Collaborations
Jing has collaborated with several talented individuals, including Daewon Kwon and Guray Tas. These collaborations have fostered a creative environment that encourages the development of cutting-edge technologies in the field.
Conclusion
Jing Zhou's contributions to CVD technology through his patents demonstrate his commitment to innovation and excellence. His work continues to influence the industry, paving the way for advancements in manufacturing processes.