Jie Liang

Title: **Innovative Contributions of Jie Liang in Plasma Processing Technology**

Introduction

Jie Liang is a distinguished inventor based in Shanghai, China, with a remarkable focus on advancements in plasma processing technologies. With a portfolio of six patents, Liang has significantly influenced the field through his innovative designs and solutions geared toward enhancing precision and efficiency in manufacturing processes.

Latest Patents

Among his most notable inventions, Liang has developed a **Radio Frequency Electrode Assembly for Plasma Processing Apparatus**. This technology comprises a base with a first fluid passage connected to a fluid source, an electrostatic chuck, and a focus ring. The design incorporates a heat conducting ring that facilitates heat conduction between the focus ring and the base, enabling better adjustment of polymer distribution at the edges of substrates during processing.

Another significant patent is the **Capacitively Coupled Plasma Etching Apparatus**. This invention allows for the adjustment of the distance between the upper and lower plates through a retractable electrically conductive part. By controlling the height of the lower electrode, the system achieves stable operation of the radio-frequency loop, which is crucial for maintaining consistent processing conditions in plasma etching.

Career Highlights

Liang is currently affiliated with Advanced Micro-Fabrication Equipment Inc. China, a pivotal player in the manufacturing of advanced semiconductor equipment. His inventions not only showcase his technical expertise but also highlight his commitment to improving technologies that have widespread applications in the semiconductor industry.

Collaborations

Throughout his career, Jie Liang has collaborated with esteemed colleagues, including Tuqiang Q Ni and Yunwen Huang. These partnerships have fostered a collaborative environment that encourages innovation and the successful development of groundbreaking technologies.

Conclusion

Jie Liang's contributions to plasma processing technologies reflect a deep understanding of the intricacies of manufacturing processes. His patents demonstrate a substantial advancement in the capabilities of plasma processing apparatuses, solidifying his reputation as an influential inventor in the field. Through his work at Advanced Micro-Fabrication Equipment Inc. China, Liang continues to push the boundaries of innovation, paving the way for the future of plasma technology applications.