Company Filing History:
1 out of 117 
1 out of 11 Years Active: 2017-2018
Title: Jianhui Nan: Innovator in Inductively Coupled Plasma Technology
Introduction
Jianhui Nan is a prominent inventor based in Beijing, China. He has made significant contributions to the field of semiconductor manufacturing through his innovative designs and technologies. With a total of 2 patents, his work focuses on improving the efficiency and quality of plasma devices used in various applications.
Latest Patents
One of Jianhui Nan's latest patents is for an inductively coupled coil and an inductively coupled plasma device using the same. This invention discloses a unique design that includes an internal coil and an exterior coil, which are coaxially arranged. The internal coil consists of multiple branches that are symmetrically arranged around the axis of the coil. Similarly, the external coil also comprises branches that are nested together and symmetrically arranged. This innovative design allows for uniform plasma distribution on semiconductor wafers within the reaction chamber, thereby minimizing differences in chemical reaction rates on the wafer's surface. As a result, the quality of the etched wafer is significantly improved. This technology can be applied in semiconductor wafer manufacturing apparatus and is adaptable to other devices as well.
Career Highlights
Jianhui Nan has worked with notable companies in the semiconductor industry, including Beijing Naura Microelectronics Equipment Co., Ltd. and Beijing NMC Co., Ltd. His experience in these organizations has contributed to his expertise in developing advanced technologies for semiconductor manufacturing.
Collaborations
Jianhui Nan has collaborated with various professionals in his field, including his coworker Qiaoli Song. These collaborations have further enhanced his innovative capabilities and have led to the development of cutting-edge technologies.
Conclusion
Jianhui Nan is a distinguished inventor whose work in inductively coupled plasma technology has made a significant impact on the semiconductor industry. His innovative designs and patents continue to advance the field, improving the quality and efficiency of semiconductor manufacturing processes.