Jen-shen Maa

Title: Innovations of Inventor Jen-shen Maa

Introduction

Jen-shen Maa is a notable inventor based in Plainsboro Township, NJ (US). He has made significant contributions to the field of materials science, particularly in the detection of alkali metal ions. His innovative approach has implications for various industries, especially in semiconductor manufacturing.

Latest Patents

Jen-shen Maa holds a patent titled "Method of detecting alkali metal ions." This patent describes a method for determining the presence of alkali metal ions in a substrate comprising silicon or silicon doped with a p-type conductivity modifier. The process involves etching the substrate in a tetrafluoromethane/oxygen plasma and comparing the etch rate against similar substrates with known concentrations of alkali metal ions. The etch rate increases with higher alkali metal concentrations, making this method particularly useful for assessing contamination levels during multistep processing of these substrates. He has 1 patent to his name.

Career Highlights

Jen-shen Maa has had a distinguished career, working at RCA Inc., where he has applied his expertise in materials science and semiconductor technology. His work has contributed to advancements in the detection and analysis of materials critical to the electronics industry.

Collaborations

One of his notable collaborators is Lawrence K. White, with whom he has worked on various projects related to semiconductor technology and materials analysis.

Conclusion

Jen-shen Maa's innovative methods for detecting alkali metal ions represent a significant advancement in materials science. His contributions continue to influence the semiconductor industry and enhance the understanding of material properties.