Jeffrey Lan

Title: Innovations of Jeffrey Lan in MEMS Technology

Introduction

Jeffrey Lan is a notable inventor based in Cupertino, California, recognized for his contributions to the field of Micro-Electro-Mechanical Systems (MEMS). He holds two patents that showcase his innovative approaches to MEMS device fabrication.

Latest Patents

One of Jeffrey Lan's latest patents is a method of creating MEMS device cavities by a non-etching process. This method involves using a sacrificial layer that contains a heat vaporizable polymer to form a gap between a moveable layer and a substrate. In one embodiment, the process includes depositing a polymer layer over a substrate, forming an electrically conductive layer over the polymer layer, and vaporizing at least a portion of the polymer layer to create a cavity between the substrate and the electrically conductive layer. Another embodiment details the creation of an interferometric modulator, which includes providing a substrate, depositing a first electrically conductive material, and using a removable sacrificial material to form a cavity between two conductive layers.

Career Highlights

Jeffrey Lan is currently employed at Qualcomm MEMS Technologies, Inc., where he continues to advance the field of MEMS technology. His work focuses on innovative methods that enhance the performance and efficiency of MEMS devices.

Collaborations

Throughout his career, Jeffrey has collaborated with notable colleagues such as Chun-Ming Wang and Teruo Sasagawa, contributing to the development of cutting-edge MEMS technologies.

Conclusion

Jeffrey Lan's innovative work in MEMS technology, particularly his patented methods for creating device cavities, highlights his significant contributions to the field. His ongoing efforts at Qualcomm MEMS Technologies, Inc. continue to push the boundaries of what is possible in MEMS device fabrication.