Company Filing History:
Years Active: 2016
Title: Jarmo Kemppainen: Innovator in Microelectromechanical Systems
Introduction
Jarmo Kemppainen is a notable inventor based in Helsinki, Finland. He has made significant contributions to the field of microelectromechanical systems (MEMS). His innovative work has led to the development of a unique manufacturing method for microelectromechanical flexural resonators.
Latest Patents
Kemppainen holds a patent for a microelectromechanical resonator. This patent describes a method for manufacturing microelectromechanical flexural resonators with a deforming element that features an elongate body extending along a spring axis. The deforming element is strategically positioned on a semiconductor wafer with a defined nominal n-type doping concentration. This arrangement creates a specific crystal orientation angle between the spring axis of the deforming element and a crystal axis of the silicon semiconductor wafer. The combination of the crystal orientation angle and the nominal n-type doping concentration is meticulously adjusted to minimize total frequency error across a broad temperature range. This optimization also reduces sensitivity to variations in material properties.
Career Highlights
Kemppainen is associated with Murata Manufacturing Co., Ltd., a company renowned for its advancements in electronic components. His work at Murata has allowed him to further explore and refine his innovative ideas in MEMS technology.
Collaborations
Throughout his career, Kemppainen has collaborated with talented individuals such as Antti Iihola and Ville Kaajakari. These collaborations have contributed to the advancement of his research and the successful development of his patented technologies.
Conclusion
Jarmo Kemppainen's contributions to the field of microelectromechanical systems exemplify the spirit of innovation. His patent for a microelectromechanical resonator showcases his expertise and commitment to advancing technology.