Company Filing History:
Years Active: 2002-2003
Title: James M Olivas: Innovator in Wafer Drying Technology
Introduction
James M Olivas is a notable inventor based in Scotts Valley, CA (US). He has made significant contributions to the field of wafer drying technology, holding a total of 4 patents. His innovative approaches have advanced the methods used in the semiconductor industry.
Latest Patents
Among his latest patents is the "Wafer drying apparatus and method." This invention focuses on removing liquid from wafers that have been wet in a liquid bath. The apparatus allows for the controlled separation of the wafer and the bath, ensuring that the meniscus forms at an optimal rate. The design includes a gas-filled volume defined by a hot chamber that continuously transfers thermal energy to the wafer, enhancing the drying process.
Another significant patent is the "Apparatus for drying batches of disks." This invention outlines methods for drying substrates that have been wet in an elongated liquid bath. The substrates are moved relative to the bath and an elongated gas-filled volume, with the flow rate of gas carefully regulated to maintain the integrity of the liquid bath. This innovative approach ensures efficient drying without disturbing the liquid.
Career Highlights
James has worked with Lam Research Corporation, where he applied his expertise in developing advanced drying technologies. His work has been instrumental in improving the efficiency and effectiveness of wafer processing in the semiconductor industry.
Collaborations
James has collaborated with notable professionals in his field, including Jonathan E Borkowski and Oliver David Jones. Their combined efforts have contributed to the advancement of wafer drying technologies.
Conclusion
James M Olivas is a distinguished inventor whose work in wafer drying technology has made a significant impact on the semiconductor industry. His innovative patents and collaborations highlight his commitment to advancing this critical field.