James Leung

Title: Innovations by James Leung in Gas Flow Metrology

Introduction

James Leung is an accomplished inventor based in San Jose, CA. He has made significant contributions to the field of gas flow metrology, particularly in substrate processing systems. His innovative work has led to the development of a unique patent that enhances the efficiency and accuracy of gas flow measurements.

Latest Patents

James Leung holds a patent titled "Hybrid flow metrology for improved chamber matching." This patent describes a gas flow metrology system that includes N primary valves, N mass flow controllers, and N secondary valves. The system is designed to selectively flow gas from multiple sources, improving the accuracy of flow rate measurements. The controller in this system performs hybrid flow metrology by utilizing different methods to determine the actual flow rate for selected gases.

Career Highlights

James Leung is currently employed at Lam Research Corporation, where he continues to innovate in the field of gas flow metrology. His work has been instrumental in advancing technologies that support substrate processing systems. With a focus on precision and efficiency, he has established himself as a key figure in his field.

Collaborations

James has collaborated with notable colleagues, including Evangelos T Spyropoulos and Piyush Agarwal. These collaborations have fostered an environment of innovation and have contributed to the success of their projects.

Conclusion

James Leung's contributions to gas flow metrology exemplify the impact of innovative thinking in technology. His patent and work at Lam Research Corporation highlight his commitment to advancing the field. Through his efforts, he continues to shape the future of substrate processing systems.