Company Filing History:
Years Active: 1995-1997
Title: The Innovations of James J Greed, Jr.
Introduction
James J Greed, Jr. is a notable inventor based in Los Gatos, California. He has made significant contributions to the field of topographic instruments, holding a total of three patents. His work focuses on enhancing the precision and calibration of these instruments, which operate at sub-micrometer resolution levels.
Latest Patents
One of his latest patents is a method for calibrating a topographic instrument. This method involves providing a calibration standard with a known one-dimensional power spectral density function. The roughness is calculated from this function in relation to an atomic scale topographic dimension. The roughness of the calibration standard is measured by detecting light scattering and computing an isotropic power spectral density curve. The measured roughness is then compared against the calculated roughness to ensure accuracy.
Another significant patent is for the formation of atomic scale vertical features for topographic instruments. This calibration target features dimensions on the order of 10 Angstroms in vertical height. The features are formed on a silicon substrate by depositing a thick oxide over the wafer surface. A pattern of features is etched to the level of raw silicon, creating atomic scale vertical topographic dimensions. Millions of such features can be produced simultaneously to mimic the effects of haze or micro-roughness on polished wafers.
Career Highlights
James J Greed, Jr. is currently employed at VLSI Standards, Inc., where he continues to innovate in the field of topographic instruments. His expertise and contributions have been instrumental in advancing the technology used in precision measurements.
Collaborations
He has collaborated with notable coworkers, including Ellen R Laird and W Murray Bullis, who have also contributed to the advancements in this field.
Conclusion
James J Greed, Jr. is a prominent inventor whose work in topographic instruments has led to significant advancements in calibration methods. His patents reflect a deep understanding of precision measurement technology, making him a valuable asset in the field.
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