Location History:
- Santa Clara, CA (US) (2002)
- San Jose, CA (US) (1993 - 2003)
Company Filing History:
Years Active: 1993-2003
Title: Innovations by James Howard in Workpiece Processing Systems
Introduction
James Howard is a notable inventor based in San Jose, California. He has made significant contributions to the field of workpiece processing systems, particularly in the semiconductor industry. With a total of 5 patents to his name, Howard's innovations have advanced the efficiency and effectiveness of wafer handling in vacuum environments.
Latest Patents
One of Howard's latest patents is the Dual Cassette Load Lock. This invention features a workpiece loading interface that is integral to a workpiece processing system designed for wafers in a vacuum. The system includes two separate chambers that can be independently pumped down. This allows for simultaneous access to one cassette of wafers while loading another in the second chamber. The design minimizes intrusion into clean rooms, with a unique door mechanism that first moves the door away from the chamber opening before lowering it parallel to the chamber. This innovative approach enables a cassette of wafers to be lowered through the opening in a motion similar to that of a drawbridge. Additionally, the cassette can pivot within the chamber, accommodating different access positions.
Career Highlights
James Howard is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work has been pivotal in enhancing the technology used in wafer processing systems.
Collaborations
Howard has collaborated with notable colleagues, including Masato M Toshima and Phil M Salzman. Their combined expertise has contributed to the development of advanced technologies in the field.
Conclusion
James Howard's contributions to workpiece processing systems exemplify the innovative spirit of modern inventors. His patents, particularly the Dual Cassette Load Lock, showcase his commitment to improving efficiency in semiconductor manufacturing.