Inseok Seo

Title: Inseok Seo: Innovator in Substrate-Processing Technology

Introduction

Inseok Seo is a notable inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of substrate-processing technology, particularly through his innovative patent.

Latest Patents

Inseok Seo holds a patent for an "Impedance measurement jig and method of controlling a substrate-processing apparatus using the jig." This invention includes a first contact plate, a second contact plate, a cover plate, a plug, and an analyzer. The first contact plate establishes electrical contact with an electrostatic chuck (ESC) in a substrate-processing apparatus. The second contact plate connects with a focus ring that surrounds the ESC. The cover plate is designed to cover the upper surface of the substrate-processing apparatus. The plug is installed at the cover plate to selectively contact either the first or second contact plate. The analyzer applies power to both contact plates through the plug to measure the impedances of the ESC and the focus ring. This allows for individual inspection of both components.

Career Highlights

Inseok Seo is currently employed at Samsung Electronics Co., Ltd., where he continues to develop innovative solutions in substrate processing. His work has contributed to advancements in the efficiency and effectiveness of semiconductor manufacturing processes.

Collaborations

Inseok has collaborated with notable colleagues, including Byeongsang Kim and Dougyong Sung, who have also contributed to the field of substrate processing technology.

Conclusion

Inseok Seo's innovative work in impedance measurement technology showcases his commitment to advancing substrate-processing methods. His contributions are significant in the realm of semiconductor manufacturing, reflecting the importance of innovation in this critical industry.