Inna Louneva

Title: Inna Louneva: Innovator in Semiconductor Processing

Introduction

Inna Louneva is a prominent inventor based in Palo Alto, CA, specializing in semiconductor processing technologies. She has made significant contributions to the field, particularly through her innovative patent related to wafer fabrication data acquisition and management systems.

Latest Patents

Inna Louneva holds a patent for a semiconductor processing device that includes a tool equipped with one or more sensors, a primary data communication port, and a secondary data communication port. The invention provides a sensor data acquisition subsystem that collects sensor data from the tool via the secondary port. Additionally, it acquires manufacturing execution system (MES) operation messages through the primary port. The sensor data is then communicated to a sensor processing unit, which processes and analyzes the data. This processing unit can also make product or processing-related decisions, such as activating an alarm if the process is not operating within control limits.

Career Highlights

Inna is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. Her work focuses on enhancing the efficiency and reliability of semiconductor manufacturing processes.

Collaborations

In her career, Inna has collaborated with notable colleagues, including Sherry Cordova and Terry Lee Doyle, contributing to various projects that advance semiconductor technology.

Conclusion

Inna Louneva's innovative work in semiconductor processing has made a significant impact on the industry. Her patent demonstrates her commitment to improving manufacturing processes and ensuring product quality.