Company Filing History:
Years Active: 2010-2013
Title: Ikuya Kameyama: Innovator in Ion Beam Technology
Introduction
Ikuya Kameyama is a notable inventor based in Fort Collins, CO (US). He has made significant contributions to the field of ion beam technology, holding a total of 3 patents. His work focuses on enhancing the uniformity and control of ion beams, which are crucial in various applications, including semiconductor manufacturing.
Latest Patents
Kameyama's latest patents include innovative designs that improve ion beam performance. One of his patents, titled "Grid transparency and grid hole pattern control for ion beam uniformity," outlines a design process for modifying hole locations and sizes in an ion beam grid. This process involves identifying a control grid to be modified and obtaining a change factor for the grid pattern. The change factor can be either a hole location change factor or a hole diameter change factor. The patent also describes an ion beam grid characterized by hole locations or sizes defined by a change factor modification.
Another significant patent is "Grid providing beamlet steering," which details a grid assembly that steers ion beamlets emitted from a discharge chamber at circularly asymmetrically determined steering angles. This assembly includes two grids with a circular pattern of holes, where the holes in the second grid are offset relative to those in the first grid. This offset allows for the electrostatic attraction of ions towards the closest circumferential portion of the downstream offset holes, altering their trajectories and enabling precise steering of the beamlets.
Career Highlights
Kameyama is currently employed at Veeco Instruments Inc., a company known for its advanced manufacturing equipment and technology. His work at Veeco has allowed him to apply his innovative ideas in practical settings, contributing to the advancement of ion beam technology.
Collaborations
Kameyama collaborates with Daniel E Siegfried, a coworker who shares his passion for innovation in the field. Together, they work on projects that push the boundaries of ion beam applications.
Conclusion
Ikuya Kameyama's contributions to ion beam technology through his patents and work at Veeco Instruments Inc. highlight his role as a key innovator in this specialized field. His advancements are paving the way for future developments in ion beam applications.