Hoi-Sung Chung

Title: Hoi-Sung Chung: Innovator in Semiconductor Technology

Introduction

Hoi-Sung Chung is a prominent inventor based in Sunnyvale, CA, known for his contributions to semiconductor technology. He has made significant strides in the field, particularly in the growth of thin oxide layers, which are crucial for various electronic applications. His innovative approach has led to the development of a patented method that enhances the efficiency of semiconductor devices.

Latest Patents

Hoi-Sung Chung holds a patent for a method titled "Growth of thin oxide layer with silicon nitride and conversion." This patent describes a process for forming an oxide layer that includes creating a protective interlayer oxide on the sidewalls of a trench formed on a substrate. The method involves forming a silicon nitride layer on the protective interlayer oxide using a plasma-enhanced atomic layer deposition (PE ALD) process with nitrogen-containing process gas. The resulting silicon nitride layer features a concentration gradient of nitrogen, which varies from high concentration away from the protective interlayer oxide to low concentration near it. The process culminates in a conversion step that oxidizes the silicon nitride layer, partially converting it into a silicon oxide layer. Hoi-Sung Chung has 1 patent to his name.

Career Highlights

Hoi-Sung Chung is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work at Applied Materials has positioned him as a key player in advancing semiconductor manufacturing technologies. His innovative methods have contributed to the development of more efficient and reliable electronic components.

Collaborations

Hoi-Sung Chung collaborates with various professionals in the field, including his coworker Fredrick Fishburn. Their combined expertise fosters an environment of innovation and progress within the company.

Conclusion

Hoi-Sung Chung's contributions to semiconductor technology through his patented methods demonstrate his commitment to innovation in the field. His work continues to influence the development of advanced electronic devices, solidifying his reputation as a leading inventor in the industry.