Hisaaki Kanai

Title: Hisaaki Kanai: Innovator in Defect Inspection Technology

Introduction

Hisaaki Kanai is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of defect inspection technology, holding two patents that showcase his innovative approach to improving inspection methods.

Latest Patents

Kanai's latest patents include a defect inspection apparatus and a defect inspection method. The defect inspection apparatus features an illumination unit that irradiates a sample with a linear illumination spot. It also includes a condensing detection unit that condenses reflected light from the sample and controls the polarization state of the incident light to form an optical image. The sensor unit outputs this optical image and is equipped with an array-shaped light receiving portion and an antireflection film positioned conjugate with the illumination spot. Notably, the condensing detection unit enhances light incident efficiency to the sensor unit, with the normal line of the light receiving surface inclined from the optical axis by 10 degrees or more and less than 80 degrees. This innovative design increases optical magnification in the lateral direction of the illumination spot.

The second patent, a defect inspection device, also utilizes a linear illumination spot to irradiate a sample. It features a condensing detection unit that condenses reflected light and a sensor unit that forms an optical image on a light reception surface, outputting it as an electrical signal. The angles formed between the optical axis of the condensing detection unit and the longitudinal direction of the linear illumination spot, as well as between the line sensor and the optical axis, are carefully calibrated to enhance the inspection process.

Career Highlights

Hisaaki Kanai is associated with Hitachi High-Tech Corporation, where he continues to develop advanced technologies in defect inspection. His work has significantly impacted the efficiency and accuracy of inspection processes in various industries.

Collaborations

Kanai collaborates with talented individuals such as Toshifumi Honda and Yuta Urano, contributing to the innovative environment at Hitachi High-Tech Corporation.

Conclusion

Hisaaki Kanai's contributions to defect inspection technology through his patents reflect his dedication to innovation and excellence in his field. His work continues to influence the industry and improve inspection methodologies.