Hiran Rajitha Rathnasinghe

Title: Hiran Rajitha Rathnasinghe: Innovator in Substrate Processing Technology

Introduction

Hiran Rajitha Rathnasinghe is a notable inventor based in Fremont, CA. He has made significant contributions to the field of substrate processing technology, holding a total of 3 patents. His work focuses on innovative designs that enhance the efficiency and functionality of substrate support systems.

Latest Patents

Hiran's latest patents include the "Bottom and Middle Edge Rings" and "Moveable Edge Ring Designs." The bottom ring is designed to support a moveable edge ring, which can be raised and lowered relative to a substrate support. This bottom ring features a stepped upper surface, an annular inner and outer diameter, and a series of vertical guide channels that facilitate the movement of lift pins. The moveable edge ring is engineered to interface with guide features extending from the bottom and middle rings during the tuning process, ensuring precise adjustments in substrate processing systems.

Career Highlights

Hiran is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His role involves developing advanced technologies that improve substrate processing, which is critical for the manufacturing of semiconductor devices. His innovative designs have contributed to the company's reputation for excellence in the field.

Collaborations

Hiran has collaborated with several talented individuals, including Jon McChesney and Shawn Tokairin. These collaborations have fostered a creative environment that encourages the development of cutting-edge technologies in substrate processing.

Conclusion

Hiran Rajitha Rathnasinghe is a distinguished inventor whose work in substrate processing technology has led to multiple patents and significant advancements in the industry. His contributions continue to shape the future of semiconductor manufacturing.