Location History:
- Ibaraki-ken, JP (1997)
- Niihari-mura, JP (1999)
Company Filing History:
Years Active: 1997-1999
Title: Innovations by Hideto Gotoh
Introduction
Hideto Gotoh is a notable inventor based in Ibaraki-ken, Japan. He has made significant contributions to the field of semiconductor technology, particularly in the development of rinsing solutions and cleaning methods that enhance the fabrication of integrated circuits. With a total of 2 patents, his work is crucial for ensuring the reliability and efficiency of electronic devices.
Latest Patents
Hideto Gotoh's latest patents include a rinsing solution after the resist stripping process and a semiconductor device fabrication method. The rinsing solution is designed to be applied after the resist is removed with an alkaline solution. This noncorrosive rinse solution is composed of a water-soluble monovalent lower alcohol and an organic or inorganic acid, among other components. It effectively prevents corrosion when removing resist from Al-Si-Cu wiring material, which is commonly used in high-density integrated circuits.
The semiconductor device fabrication method involves forming a multilayer resist on a BPSG layer atop a silicon wafer. The process includes dry etching to create a contact hole, followed by a cleaning treatment that removes polymer residues without degrading electrical characteristics. This innovative approach ensures high precision in contact hole formation and maintains the integrity of the electrical properties, even with ultrafine-pitch patterns.
Career Highlights
Hideto Gotoh is currently employed at Texas Instruments Corporation, where he continues to advance semiconductor technologies. His work has been instrumental in improving the manufacturing processes of electronic components, contributing to the overall efficiency and performance of devices.
Collaborations
Hideto has collaborated with notable coworkers such as Masaru Utsugi and Masao Miyazaki. Their combined expertise has fostered innovation and development in the semiconductor field.
Conclusion
Hideto Gotoh's contributions to semiconductor technology through his patents and innovative methods have significantly impacted the industry. His work continues to play a vital role in enhancing the performance and reliability of electronic devices.