Location History:
- Miyagi Prefecture, JP (2005)
- Miyagi-ken, JP (2005)
- Watari-gun, JP (2005)
Company Filing History:
3 out of 8,902 
1 out of 5 Years Active: 2005
Title: Innovations by Hidekazu Kikuchi in Microlithography
Introduction
Hidekazu Kikuchi is a notable inventor based in Miyagi Prefecture, Japan. He has made significant contributions to the field of microlithography, particularly through his innovative designs and patents. With a total of three patents to his name, Kikuchi has focused on enhancing the stability and efficiency of reticle handling in charged-particle-beam microlithography.
Latest Patents
Kikuchi's latest patents include advanced reticle manipulators and related methods for conveying thin, circular reticles. These robotic reticle manipulators are designed to hold and convey reticles with exceptional stability. One embodiment features an arm capable of executing movements in the X-, Y-, and Z-directions. The manipulator includes a U-shaped fork that defines recessed surfaces and vacuum ports for securely holding the reticle at its narrow handling zone. Each vacuum port is equipped with an upwardly extending lip that provides a reticle-contact surface, ensuring that the reticle is held securely during conveyance to prevent damage.
Another patent focuses on reticle-holding pods and methods for holding thin, circular reticles. These reticle pods consist of a base and cover, with multiple reticle-support blocks mounted to the base. The design allows for stable support of the reticle at three points in the handling zone, utilizing compliant pressure-application members that apply a holding force without damaging the reticle.
Career Highlights
Kikuchi has worked with prominent companies in the industry, including Nikon Corporation and Sendai Nikon Corporation. His experience in these organizations has contributed to his expertise in microlithography and reticle handling technologies.
Collaborations
Kikuchi has collaborated with notable colleagues such as Yukiharu Okubo and Akihiro Yamamoto. Their combined efforts have further advanced the field of microlithography and improved the efficiency of reticle handling systems.
Conclusion
Hidekazu Kikuchi's innovative contributions to microlithography through his patents and collaborations have significantly impacted the industry. His work continues to enhance the stability and efficiency of reticle handling, showcasing the importance of innovation in technology.