Company Filing History:
Years Active: 1985-1996
Title: Innovations by Henri A Khoury
Introduction
Henri A Khoury is a notable inventor based in Yorktown Heights, NY (US). He has made significant contributions to the field of metrology, particularly in the development of advanced measurement tools. With a total of 7 patents to his name, Khoury's work has had a profound impact on the industry.
Latest Patents
One of his latest patents is the "Electron beam nano-metrology system." This innovative tool includes an ambient temperature electron source and a movable stage for mounting a workpiece. The stage is designed to position the workpiece's surface in a beam interrogation region. Electrostatic focus lenses convert electrons emitted by the electron source into a beam with a focal point positioned in the beam interrogation region. The lenses enable the electron beam to traverse a path that is generally orthogonal to the workpiece surface. Upper and lower electrostatic deflection plates, connected to an adjustable voltage source, allow for scanning the beam across the interrogation region while maintaining its orthogonality to the surface. This design enhances the accuracy of surface feature measurements.
Another significant patent is the "Integrated tip strain sensor for use in combination with a single axis." This sensor is designed to work with a single axis atomic force microscope (AFM) to determine the profile of a surface in three dimensions. A cantilever beam carries an integrated tip stem with a piezoelectric film strain sensor. A high-resolution direct electron beam deposition process is utilized to grow a sharp tip onto the silicon cantilever structure. The piezoelectric sensors function in a plane perpendicular to that of the AFM probe, allowing for three-dimensional metrology while avoiding catastrophic tip crashes. This technique is applicable to various linewidth surface materials, enhancing measurement capabilities.
Career Highlights
Henri A Khoury is currently employed at International Business Machines Corporation (IBM), where he continues to innovate and develop cutting-edge technologies. His work has been instrumental in advancing the field of nanometrology and improving measurement accuracy.
Collaborations
Throughout his career, Khoury has collaborated with notable colleagues, including Joachim Gerhard Clabes and Laszlo Landstein. These partnerships have contributed to the success of his projects and the advancement of technology in his field.
Conclusion
Henri A Khoury's contributions to the field of metrology through his innovative patents
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