Heng Yang

Title: **Innovator Heng Yang: Advancing MEMS Technology**

Introduction

Heng Yang is an accomplished inventor based in Shanghai, China, known for his contributions to the field of microelectromechanical systems (MEMS). With a patent to his name, he has made significant strides in the development of piezoresistive sensing elements and electrostatic actuators, showcasing his expertise in the intersection of materials science and electrical engineering.

Latest Patents

Heng Yang's notable patent is titled "MEMS device including a laterally movable portion with piezo-resistive sensing elements and electrostatic actuating elements on trench side walls, and methods for producing the same." This innovation presents a method for creating piezoresistive sensing elements and electrostatic actuator elements on trench sidewalls. The process involves the formation of P-type doped regions in the upper surface of an n-type substrate, where a trench is created via the Deep Reactive Ion Etching (DRIE) process. This trench intersects with the doped regions, allowing a movable portion of the substrate relative to the stationary parts. The diffusion of P-type dopant into the trench sidewalls enables the creation of piezoresistive and electrostatic elements, ensuring effective electrical paths and insulation through the formation of P-N junctions.

Career Highlights

Heng Yang is affiliated with the Chinese Academy of Sciences, where he continues to research and develop innovative technologies. His work has not only contributed to the advancement of MEMS devices but has also enhanced the potential applications of this technology across various industries.

Collaborations

Yang has collaborated closely with fellow researchers, including Xinxin Li and Yuelin Wang, working together to push the boundaries of MEMS research. Their joint efforts reflect a culture of collaboration at the Chinese Academy of Sciences, fostering innovation and the exchange of ideas.

Conclusion

Heng Yang's contributions to MEMS technology demonstrate the impact of innovative thinking and research on modern engineering. With his groundbreaking patent and collaborative spirit, he continues to pave the way for future advancements in the field. His work is a testament to the importance of inventors in driving technological progress and improving the efficiency of high-tech systems.