Han-Ju Lee

Title: Han-Ju Lee: Innovator in Chemical Mechanical Polishing Technology

Introduction

Han-Ju Lee is a notable inventor based in Gyeonggi-do, South Korea. He has made significant contributions to the field of chemical mechanical polishing devices, holding two patents that enhance the efficiency and reliability of semiconductor wafer processing.

Latest Patents

Han-Ju Lee's latest patents include a method for manufacturing a retainer ring for a chemical mechanical polishing device. This method involves coupling insert pins to an insert ring member, which is then placed in a mold to define a space around it. Molten shell material is injected into the mold to create a shell member that completely covers the insert ring member. This innovative approach results in a retainer ring that is both effective and reliable.

Another patent focuses on the design of a retainer ring that prevents twisting and improves the defective proportion and equipment operating rate during the polishing of semiconductor wafers. This retainer ring consists of a resin first member connected to the polishing head's carrier, with a metal second member embedded inside. This design enhances the credibility of the retaining ring and reduces initial limitations associated with mass production.

Career Highlights

Han-Ju Lee is currently employed at Will Be S & T Co., Ltd., where he continues to develop innovative solutions in the semiconductor industry. His work has significantly impacted the efficiency of chemical mechanical polishing processes.

Collaborations

Han-Ju Lee collaborates with Kwang-Hee Ku, contributing to advancements in their field through shared expertise and innovative ideas.

Conclusion

Han-Ju Lee's contributions to the field of chemical mechanical polishing technology demonstrate his commitment to innovation and excellence. His patents reflect a deep understanding of the challenges in semiconductor processing and provide effective solutions to enhance operational efficiency.