Company Filing History:
Years Active: 2023
Title: Hajime Kikuiri: Innovator in Extreme Ultraviolet Light Technology
Introduction
Hajime Kikuiri is a prominent inventor based in Tokyo, Japan. He is known for his significant contributions to the field of extreme ultraviolet (EUV) light technology. His innovative work has led to the development of advanced devices that utilize EUV light for various applications.
Latest Patents
Kikuiri holds a patent for an extreme ultraviolet light source device. This device includes a light source part that generates plasma emitting EUV light. It features a first vacuum housing that contains the light source part and a second vacuum housing positioned between the first vacuum housing and a utilizing apparatus. The design incorporates a debris trap within the second vacuum housing to deflect debris particles emitted from the plasma, ensuring that these particles do not enter the utilizing apparatus. Additionally, a window is provided between the first and second vacuum housings, allowing the EUV light to pass through. The wall of the second vacuum housing is equipped with a through-hole and a window to facilitate the passage of EUV light to the utilizing apparatus.
Career Highlights
Kikuiri is associated with Ushio Denki Kabushiki Kaisha, a company that specializes in light source technologies. His work at the company has been instrumental in advancing the applications of EUV light in various industries.
Collaborations
Kikuiri collaborates with Hironobu Yabuta, a fellow innovator in the field. Their partnership has contributed to the development of cutting-edge technologies in the realm of extreme ultraviolet light.
Conclusion
Hajime Kikuiri's contributions to extreme ultraviolet light technology exemplify the impact of innovative thinking in modern science. His patent for the EUV light source device showcases his commitment to advancing this important field.