Gwang-sik Park

Title: Gwang-sik Park: Innovator in Structured Illumination Technology

Introduction

Gwang-sik Park is a notable inventor based in Suwon-si, South Korea. He has made significant contributions to the field of semiconductor device fabrication through his innovative patent. His work focuses on enhancing inspection methods using structured illumination technology.

Latest Patents

Gwang-sik Park holds a patent for a "Structured illumination-based inspection apparatus and inspection method, and semiconductor device fabrication method including structured illumination-based inspection method." This patent describes systems and methods related to a structured illumination (SI)-based inspection apparatus. The apparatus is designed to accurately inspect an inspection object in real time with high resolution while minimizing light loss. Key components of the inspection apparatus include a light source, a phase shifting grating (PSG), a beam splitter, a movable stage for the inspection object, and a time-delayed integration (TDI) camera for capturing images.

Career Highlights

Gwang-sik Park is currently employed at Samsung Electronics Co., Ltd., where he continues to develop and refine his innovative technologies. His work has positioned him as a key player in the advancement of semiconductor inspection methods.

Collaborations

He collaborates with talented individuals such as Myung-jun Lee and Ken Ozawa, contributing to a dynamic team focused on pushing the boundaries of technology in their field.

Conclusion

Gwang-sik Park's contributions to structured illumination technology and semiconductor device fabrication highlight his role as an influential inventor. His innovative approaches continue to shape the future of inspection methods in the industry.