Gunsu Yun

Title: Innovations by Gunsu Yun

Introduction

Gunsu Yun is a notable inventor based in Pohang, South Korea. She has made significant contributions to the field of plasma processing systems, holding a total of four patents. Her work focuses on enhancing the efficiency and reliability of these systems through innovative methods.

Latest Patents

One of her latest patents is titled "Automatic fault detection and classification in a plasma processing system and methods thereof." This invention provides a method for automatically detecting fault conditions and classifying them during substrate processing. The method involves collecting processing data through a set of sensors and sending this data to a fault detection/classification component. The component performs data manipulation and executes comparisons between the processing data and a variety of fault models stored within a fault library. Each fault model characterizes a specific fault condition, including a fault signature, fault boundary, and a set of principal component analysis (PCA) parameters.

Another significant patent is "Determining plasma processing system readiness without generating plasma." This invention facilitates determining whether a plasma processing system is ready for wafer processing. The test system includes a computer-readable medium that stores a test program. The program receives electric parameter values from sensors when no plasma is present and generates electric model parameter values using these inputs. It then compares these values with baseline model parameter information to determine the readiness of the plasma processing system.

Career Highlights

Gunsu Yun is currently employed at Lam Research Corporation, where she continues to innovate in the field of plasma processing technology. Her work has been instrumental in advancing the capabilities of plasma processing systems, making them more efficient and reliable.

Collaborations

Some of her notable coworkers include Vijayakumar C Venugopal and Brian D Choi, with whom she collaborates on various projects related to plasma processing technologies.

Conclusion

Gunsu Yun's contributions to the field of plasma processing systems through her innovative patents demonstrate her expertise and commitment to advancing technology. Her work not only enhances system reliability but also paves the way for future innovations in the industry.