Company Filing History:
1 out of 832,880 Years Active: 2002
Title: Guido Schriever: Innovator in Extreme Ultraviolet and Soft X-ray Generation
Introduction
Guido Schriever, based in Aachen, Germany, is a notable inventor recognized for his contributions to the field of radiation generation. With a focus on generating extreme ultraviolet (EUV) and soft X-ray radiation, Schriever has made significant strides in the technological landscape through his innovative methods and devices.
Latest Patents
Guido Schriever holds a patent for a "Method and device for producing extreme ultraviolet and soft X-rays from a gaseous discharge." This groundbreaking patent describes a device that includes at least two electrodes, each featuring a flush opening that defines an axis of symmetry. Within this design, an intermediate space filled with a homogeneous gas is provided between the anode and cathode. The device is structured to confine the gas discharge solely within the volume defined by the flush openings. By carefully selecting current pulses in terms of amplitude and duration, a dense hot plasma channel is produced along the axis of symmetry, which serves as the source of EUV and/or soft X-ray radiation. This innovation has significant applications in EUV projection lithography, particularly in the spectral range around 13 nm.
Career Highlights
Throughout his career, Guido Schriever has dedicated himself to advancing technologies that utilize gas discharge mechanisms. His work has positioned him as an innovative thinker in the scientific community, contributing to the evolving standards of radiation applications.
Collaborations
Schriever has collaborated with esteemed colleagues, including Willi Neff and Rainer Lebert. These partnerships have facilitated the shared pursuit of advancements in the fields of extreme ultraviolet and soft X-ray technologies, further enriching his contributions to the landscape of scientific innovation.
Conclusion
In summary, Guido Schriever stands out as a pioneer in the production of extreme ultraviolet and soft X-ray radiation. His patent underscores a significant technological advancement that holds promise for the future of projection lithography. Through collaborative efforts and relentless innovation, Schriever continues to influence the field, making enduring contributions to scientific knowledge and applications.