Company Filing History:
Years Active: 1990-1992
Title: **Inventor Spotlight: Gregory T. Muhr**
Introduction
Gregory T. Muhr, an innovative inventor based in Allentown, PA, has made significant contributions to the field of metalorganic compounds and their applications in reactive deposition technologies. With three patents to his name, Muhr's work focuses on creating alternatives to traditional compounds used in the electronic manufacturing industry.
Latest Patents
Muhr's most recent patents showcase his expertise in developing amino replacements for arsine, antimony, and phosphine. One notable patent details the use of metalorganic amines as metallic donor source compounds (M(NR₂)₃-xHₓ) for processes that require deposition of specific elements. The invention emphasizes high-volatility and low-toxicity compounds, providing safer alternatives for the manufacturing of silicon integrated circuits and compound semiconductor materials.
Another patent presents a method of doping and implanting using at least partially fluorinated organometallic compounds, offering a breakthrough in organometallic vapor phase epitaxy. These materials enhance the performance of electronic devices while maintaining stable decomposition products, especially highlighting the application of tris-trifluoromethyl arsenic (As(CF₃)₃) as a substitute for traditional arsine in electronic component manufacturing.
Career Highlights
Gregory T. Muhr currently works at Air Products and Chemicals, Inc., a prominent player in the chemical industry. His career is marked by a dedication to improving the safety and efficiency of processes pivotal to semiconductor production and related electronic technologies.
Collaborations
Throughout his career, Muhr has collaborated with esteemed colleagues such as David A. Bohling and David A. Roberts. Their collective efforts contribute to advancing the field and enhancing the development of innovative technologies in the industry.
Conclusion
Gregory T. Muhr's work exemplifies the spirit of innovation and advancement in the semiconductor field. His patented methodologies not only enhance production processes but also pave the way for safer, more efficient technologies that will play a crucial role in the future of electronics manufacturing. The contributions he continues to make at Air Products and Chemicals, Inc. solidify his standing as a leading inventor in the sphere of metalorganic compounds.