Gregory L Hays

Title: Gregory L Hays: Innovator in Gas Distribution Systems

Introduction

Gregory L Hays is a notable inventor based in Fayetteville, TN (US). He has made significant contributions to the field of semiconductor manufacturing through his innovative patent. His work focuses on enhancing the efficiency and safety of gas distribution systems.

Latest Patents

Hays holds a patent for a "Process gas distribution system and method with gas cabinet exhaust flow." This invention involves gas flow control units in cabinets that are designed to distribute process gas on demand to various tool locations within a semiconductor manufacturing plant. Each gas flow control cabinet is equipped with an exhaust duct that connects to the plant's exhaust system, allowing waste gases to be expelled safely. The system includes a low flow alarm that activates if the exhaust flow falls below a predetermined level. A programmable controller is integrated to manage the alarm function, accommodating different duct sizes for versatile installation and operation.

Career Highlights

Gregory L Hays is associated with Sci Systems, Inc., where he applies his expertise in gas distribution technologies. His innovative approach has contributed to advancements in semiconductor manufacturing processes, ensuring that safety and efficiency are prioritized.

Collaborations

Hays has worked alongside notable colleagues, including Dennis A Sierk and Ronald R DuRoss. Their collaborative efforts have furthered the development of effective gas distribution solutions in the industry.

Conclusion

Gregory L Hays is a distinguished inventor whose work in gas distribution systems has made a significant impact on semiconductor manufacturing. His innovative patent reflects his commitment to improving safety and efficiency in the industry.