Location History:
- Santa Clara, CA (US) (1999)
- Allentown, PA (US) (2003)
Company Filing History:
Years Active: 1999-2003
Title: Gayathri Rao: Innovator in Semiconductor Technology
Introduction
Gayathri Rao is a prominent inventor based in Allentown, PA (US). She has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase her innovative approach to forming thin polymer layers on integrated circuit structures.
Latest Patents
Her latest patents include a method and apparatus for forming thin polymer layers on semiconductor substrates. This invention involves the vaporization of stable di-pxylylene and the pyrolytic conversion of this gaseous dimer material into reactive monomers. The process also allows for the optional blending of the resulting gaseous p-xylylene monomers with polymerizable materials in gaseous form, which can copolymerize with the p-xylylene monomers to create a low dielectric constant polymerized parylene material. The apparatus designed for this process ensures the effective distribution of polymerizable gases into the deposition chamber, cooling the substrate to condense the gases into a polymerized dielectric material, and controlling the pressure within the chamber. Additionally, it includes features for in situ plasma cleaning and enhancing the cracking of polymerizable precursor material.
Career Highlights
Gayathri Rao is currently employed at Applied Materials, Inc., where she continues to push the boundaries of semiconductor technology. Her work has been instrumental in advancing methods for creating efficient and effective polymer layers that are crucial for modern electronic devices.
Collaborations
Throughout her career, Gayathri has collaborated with notable colleagues, including Bang C Nguyen and Stuardo A Robles. These partnerships have fostered an environment of innovation and creativity, leading to groundbreaking advancements in their field.
Conclusion
Gayathri Rao's contributions to semiconductor technology through her patents and work at Applied Materials, Inc. highlight her role as a leading inventor in the industry. Her innovative methods for forming thin polymer layers are paving the way for future advancements in electronics.