Location History:
- Sunnyvale, CA (US) (1990)
- Sonny Vale, CA (US) (1995)
Company Filing History:
Years Active: 1990-1995
Title: The Innovative Journey of Ernest Keller in CVD Technology
Introduction
Ernest Keller is an accomplished inventor based in Sunnyvale, CA, known for his impactful contributions to the field of chemical vapor deposition (CVD) technology. With two patents to his name, his innovations have significantly advanced the capabilities of CVD systems, particularly in semiconductor manufacturing processes.
Latest Patents
Ernest's latest patents are pivotal in improving efficiency and precision within CVD applications. His patents include:
1. **Interchangeable CVD Chuck Surface** - This invention relates to a chuck in a coating chamber equipped with a hearth that provides heat to a substrate. It features an interchangeable chuck surface designed for supporting a substrate during processing. The system incorporates multiple chucks, enabling periodic removal of excess coatings by venting the chamber and replacing the chuck faces. Additionally, it proposes a temperature-operable interlocking feature to secure the chuck faces during operation while enhancing heat transfer through rings and grooves.
2. **Perimeter Wafer Seal** - This innovative apparatus consists of a seal ring that presses against a wafer continuously around its outer edge. Its primary function is to hold the wafer's backside against the chuck, preventing any CVD material from depositing on it. The design includes a slide operated by a cam lever and tension spring, allowing seamless operation with multiple chucks attached to a rotatable turret within a CVD chamber.
Career Highlights
Ernest Keller currently works at Genus, Inc., where his expertise has been instrumental in pioneering advancements in deposition technologies. His focus on innovative solutions in CVD systems exemplifies his commitment to enhancing the semiconductor industry's efficiency and reliability.
Collaborations
Throughout his career, Ernest has collaborated with notable professionals in the field, including David K Studley and Frederick J Scholz. Their partnerships have fostered a collaborative environment that encourages the sharing of ideas and expertise, further pushing the boundaries of CVD technology.
Conclusion
Ernest Keller's contributions to CVD technology demonstrate how dedicated inventors can drive innovation within industries. His patents not only enhance the processes involved in semiconductor manufacturing but also reflect a broader trend of continuous improvement in technology. As he continues his work at Genus, Inc., the impact of his inventions is likely to resonate throughout the industry for years to come.